MODELING OF PIEZORESISTANCE IN SILICON AND POLYSILICON
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Abstract
The piezoresistive effect is of great importance in the field of semiconductor materials physics, especially in the development of sensors based on materials such as silicon and polycrystalline silicon. Piezoresistive is the property of a material to change its electrical resistance in response to an external mechanical stress. Piezoresistive sensors are widely used not only in micromechanical systems (MEMS), but also in the fields of automation, space, and biomedicine.
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